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Session #1526

Course Assessment of the Microelectronics Process Engineering Program at SJSU

Gregory Young 1, Stacy Gleixner1, David Parent 1, Yasser Dessouky 1, Emily Allen1, and Linda Vanasupa 2.

San Jose State University 1,California Polytechnic State University, San Luis Obispo 2

Abstract

The program assessment strategy of San Jose State University's new interdisciplinary curriculum in Microelectronics Process Engineering is described. Vertical integration of specific class and program learning objectives allows for a clear and efficient method to evaluate the continued growth and improvement of the program. The program assessment process relies on clearly defined and detailed program and course learning objectives that are linked vertically to ABET outcomes. In addition, we discuss briefly the structure of the program and the "hands-on" experience that we provide the students.

Introduction

Semiconductor manufacturing companies utilize thin film processing methods to fabricate electronic components, communication devices and micromechanical devices. Process engineers are needed to develop, operate and improve these thin film processes. The concepts that are applied in manufacturing the various "high-tech" devices require a process engineer with an interdisciplinary engineering background. This modern process engineer is required to understand electrical engineering design rules, electronic material properties, and the physics that describe mass, momentum and energy transport. In addition to the multidisciplinary engineering aspects of microelectronics curricula, a 1991 Semiconductor Research Corporation (SRC) report suggests that more emphasis should be placed on statistical process control (SPC), design of experiments (DOE), yield management and total quality management (TQM) [1].

In response to the microelectronics industry needs, San Jose State University has designed a Microelectronics Process Engineering Program (µProE) to educate engineers in microelectronics fabrication as well as to address the missing manufacturing statistical analysis missing in traditional curricula. The goal is to produce graduates with the technical background to understand both the devices being produced and the processes by which they are manufactured. This bachelor's degree program includes coursework from the traditional disciplines of electrical, chemical, materials and industrial and systems engineering, as well as a laboratory course sequence in which integration of the disciplines is explicitly achieved. A detailed description of

“Proceedings of the 2002 American Society for Engineering Education Annual Conference & Exposition Copyright Ó 2002, American Society for Engineering Education”

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Young, G. (2002, June), A Course Assessment Of The Microelectronics Process Engineering Program At Sjsu Paper presented at 2002 Annual Conference, Montreal, Canada. 10.18260/1-2--10851