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Session 2663

A Microelectronics Fabrication and Packaging Learning Laboratory for Manufacturing Engineers

Timothy S. McLaren

Washington State University - Vancouver

Abstract

Washington State University (WSU) has recently established a Manufacturing Engineering program at its Vancouver campus. Included in a new laboratory building is a microelectronics learning laboratory specifically for teaching this application of manufacturing engineering. Vancouver is located within the Portland, Oregon metropolitan region, sometimes referred to as the “Silicon Forest” due to a high concentration of semiconductor and microelectronics related manufacturing facilities.

The traditional educational path for manufacturing engineers in the microelectronics industry does not usually include many of the critical aspects of manufacturing engineering. This means that engineers in production have to pick up much of the background they need through other, less effective, means. Our goal is to provide a curriculum that will prepare students with the necessary knowledge and skills of traditional manufacturing engineering, and also offer specific manufacturing engineering elective courses directed at microelectronics.

A new lab, including a class 100 clean room, has been equipped with a range of representative equipment for fundamental device fabrication, packaging and inspection/diagnostics. The cost of the equipment is approximately $750,000.

This paper describes the concept, structure, potential and details of the lab equipment. The WSU courses that are slated to utilize this new lab are described to illustrate the educational potential.

Introduction

Washington State University established a new campus in Vancouver (WSUV) in 1989 using temporary facilities. In fall 1996 WSUV moved into new facilities on its own campus. The campus has grown steadily in both physical facilities and academic programs offered. The Bachelor of Science program in Manufacturing Engineering (MfgE) was introduced in fall 1997. The objectives for the Manufacturing Engineering program are three-fold: 1. Offer accredited engineering courses and degrees to place-bound students in Clark County, Southwest Washington and the Portland, Oregon metropolitan region (employed adults and others who seek to enter the field), 2. Provide engineering courses and degrees to industry employees via on-campus or distance learning, and

Proceedings of the 2001 American Society for Engineering Education Annual Conference & Exposition Copyright © 2001, American Society for Engineering Education

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McLaren, T. (2001, June), A Microelectronics Fabrication And Packaging Learning Laboratory For Manufacturing Engineers Paper presented at 2001 Annual Conference, Albuquerque, New Mexico. 10.18260/1-2--9558