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Application of Virtual Reality Simulation in Photolithography Laboratory Experiments

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2018 ASEE Annual Conference & Exposition


Salt Lake City, Utah

Publication Date

June 23, 2018

Start Date

June 23, 2018

End Date

July 27, 2018

Conference Session

Investigating Instructional Strategies

Tagged Division

Multidisciplinary Engineering

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Paper Authors

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Reza Kamali Utah Valley University


Afsaneh Minaie Utah Valley University

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Afsaneh Minaie is a professor of Computer Engineering at Utah Valley University. She received her B.S., M.S., and Ph.D. all in Electrical Engineering from University of Oklahoma. Her research interests include gender issues in the academic sciences and engineering fields, Embedded Systems Design, Mobile Computing, Wireless Sensor Networks, Nanotechnology, Data Mining and Databases.

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Julie Clingo Utah Valley University

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Animation & Game Development major at Utah Valley University.

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Marty J Clayton Digital Media

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Undergraduate degree at The Ohio State University
Graduate Degree at Savannah College of Art and Design
Full time Instructor at Columbus College of Art and Design
Adjunct professor at University of Utah
Associate Professor at Utah Valley University

Marty Clayton entered the 3D animation and video game industries through the “back door” when those industries were in their infancy. He received his Bachelor’s Degree from The Ohio State University in a rigorous design program in which he learned how to design indoor and outdoor spaces. He graduated with the Senior Award for his program and his senior design for the Baltimore Inner Harbor was featured in a national publication. Even back in the early 1980’s his interests in computers and graphics was strong. Quickly in his career, he turned his focus on CAD production drawings on the computer and built a computer division and set standards at the Myers/Schmallenberger Design firm in Columbus, Ohio.

In the Early 1990’s, Marty started up his own consulting company doing visualizations and animation for companies in the design industry. Some of his clients included: Rubbermaid, Christian Broadcasting Network, Frigidaire, Hobart Ware-washing Division, Character Builders, and American Greetings. The highlight to his consultant career was working on the 1996 movie “Space Jam” and had 10 seconds of animation featured in the movie. While running his own consulting company, Marty also taught 3D design and animation full-time at the Columbus College of Art and Design and realized that his true passion was teaching. He would spend the next 15 years preparing himself for that goal.

Marty entered the video game industry in 1997, and has worked as everything from an Environmental Artist to a Development Manager to an Associate Art Director. He has worked with outsourcing partners both nationally and internationally in environmental design, modeling/texturing, character development and animation. Marty took a short 2-year sabbatical to get his MFA from Savannah College of Art and Design in Animation and used those talents to continue his 15 year career in the video game industry.

In recent years, Marty has taught adjunct in the game programs for the Art Institute and the University of Utah. In 2012 realized his goal and joined the Digital Media Department at Utah Valley University using his skills in the design, pre-production, and production phases of the video game and animation industries, his hope is to work closely with the other faculty to help the UVU students grow and stand above students from other schools and programs, ultimately making a difference in the highly competitive entertainment industry.

Notable Projects: Top Gear Rally 2, Tiger Woods Golf, Nerf N Strike and N-Strike Elite, Monopoly Streets, Sims 3 Pets for the 3DS. Currently working on Virtual Reality and Augmented Realtiy projects with students and faculty.

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Cody Anderson

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This project is a virtual reality simulation of the photolithography process, which will take the user from the start of the process to the end result. Using a headset and controllers, each user of the simulation will handle photolithography equipment and materials in a 3D environment. From wafer preparation to UV exposure and development, the user is able to quickly understand the process without ever having to set foot in a lab. The goal of this project is to create an environment in which students and educators can go through the process of photolithography without the risk of damaging high cost machines and materials. The simulation will provide feedback for each step of the process, enabling students to quickly recognize both errors and correct actions. The user is able to make mistakes without damaging actual equipment, and so is able to learn in a safe, low-cost environment. Instructions developed in this paper are designed for Introduction to Nanotechnology Laboratory. The same experiments can be conducted in Chemistry Lab. Procedures are designed for experiments conducted in a standard two hours laboratory time. Outcomes of this project are introducing the new accessible laboratory in the curriculum of study and take advantage of new technologies for teaching purpose. Assessment is being done by survey of students who participated in this optional laboratory experiment.

Kamali, R., & Minaie, A., & Clingo, J., & Clayton, M. J., & Anderson, C. (2018, June), Application of Virtual Reality Simulation in Photolithography Laboratory Experiments Paper presented at 2018 ASEE Annual Conference & Exposition , Salt Lake City, Utah. 10.18260/1-2--29809

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