Salt Lake City, Utah
June 23, 2018
June 23, 2018
July 27, 2018
This project is a virtual reality simulation of the photolithography process, which will take the user from the start of the process to the end result. Using a headset and controllers, each user of the simulation will handle photolithography equipment and materials in a 3D environment. From wafer preparation to UV exposure and development, the user is able to quickly understand the process without ever having to set foot in a lab. The goal of this project is to create an environment in which students and educators can go through the process of photolithography without the risk of damaging high cost machines and materials. The simulation will provide feedback for each step of the process, enabling students to quickly recognize both errors and correct actions. The user is able to make mistakes without damaging actual equipment, and so is able to learn in a safe, low-cost environment. Instructions developed in this paper are designed for Introduction to Nanotechnology Laboratory. The same experiments can be conducted in Chemistry Lab. Procedures are designed for experiments conducted in a standard two hours laboratory time. Outcomes of this project are introducing the new accessible laboratory in the curriculum of study and take advantage of new technologies for teaching purpose. Assessment is being done by survey of students who participated in this optional laboratory experiment.
Kamali, R., & Minaie, A., & Clingo, J., & Clayton, M. J., & Anderson, C. (2018, June), Application of Virtual Reality Simulation in Photolithography Laboratory Experiments Paper presented at 2018 ASEE Annual Conference & Exposition , Salt Lake City, Utah. https://peer.asee.org/29809
ASEE holds the copyright on this document. It may be read by the public free of charge. Authors may archive their work on personal websites or in institutional repositories with the following citation: © 2018 American Society for Engineering Education. Other scholars may excerpt or quote from these materials with the same citation. When excerpting or quoting from Conference Proceedings, authors should, in addition to noting the ASEE copyright, list all the original authors and their institutions and name the host city of the conference. - Last updated April 1, 2015