June 15, 2019
June 15, 2019
October 19, 2019
Computing and Information Technology
We have developed a “Dry Etching” laboratory experiment using Virtual Reality (VR) for an associate level course in nanotechnology. This laboratory will be representation of a plasma etcher to be used as a pedagogical tool to train students in its proper use. Plasma etching tools are expensive and require extensive maintenance, and using chemical gases in a real-world plasma etcher requires careful attention and error-free procedures. While dry etching is an important part of nanotechnology training, it is normally taught one-on-one to ensure a safe laboratory practice. In this paper, new methods are being addressed to help the teaching of plasma etching in a large size classroom. Our method provides an automatic assessment measure. Virtual Reality enables students to have full access to a plasma etcher in a virtual classroom and learn the proper steps to run the machine in a safe environment. We have developed a training session to learn the basic procedure for using the plasma etcher. These procedures were practiced, and then presented to a group of volunteer students who wanted to learn and work with a plasma etcher. Several processes were documented to create this pedagogical tool for the classroom: correct application of dry etching and expected result of an etching process, an understanding of the sample preparation for plasma etching, and the processes to apply etching and related variables. These processes, along with a representation of the machine, were created in virtual reality. It gives students a tool to help see and understand abstract concepts presented to them during their education in nanotechnology. This will benefit institutions who do not have access to a plasma etcher or have limited space or equipment for teaching dry etching.
Kamali, R., & Meyers, M., & Kamali-Sarvestani, N. (2019, June), Board 29: Creating a Virtual Reality Simulation of Plasma Etcher to Facilitate Teaching and Practice of Dry Etching in Nanotechnology Education Paper presented at 2019 ASEE Annual Conference & Exposition , Tampa, Florida. 10.18260/1-2--32314
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