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Course Development Experience on Particle Transport, Deposition and Removal and Engineering of Nano/Micro-Scale Systems

Goodarz Ahmadi and Cetin Cetinkaya

Clarkson University, Potsdam, NY, 13699-5725, USA

Nano- and micro-particle transport, deposition and removal occur in many important processes in microelectronic, imaging, pharmaceutical and food processing industries. In addition, numerous environmental processes involve particle transport, deposition and removal. In the last decade, significant research progress in the areas of nano- and micro-particle transport, deposition and removal has been made. A series of courses was developed to make these class of new important research findings available to seniors and graduate students in engineering through developing and offering of specialized curricula. This project involved integration of numerical simulations and experiments in the developed courses. The course materials were mostly made available on the web and some courses were taught at University 1 and University 2 campuses simultaneously. Based on the course materials, a series of short courses was also offered at several countries. The first two courses on particle transport, deposition and removal are composed of four modules: i) Fundamental of particle transport, dispersion, deposition and removal. ii) Computational modeling of particle transport, deposition and removal. iii) Experimental study of particle transport, deposition and removal. iv) Industrial applications of particle transport, deposition and removal.

Based on the experience in the course of the development of these course, an undergraduate course (Nano/Micro-scale Systems Engineering) was developed and funds were obtained for its implementation from the NSF under the Nanotechnology Undergraduate Education program. The chief instructional objective of the proposed course is to provide instructions on the design, analysis, simulation and implementation/fabrication of nano/micro-scale engineering systems. The course consists of three main components to address a set of its well-defined educational objectives: (i) lectures developed and delivered by a multidisciplinary team at University 1, (ii) instructions on computational design/analysis and simulation tools and (iii) a hands-on workshop for experience with cleanroom and fabrication facilities. The second component has been developed with help of software companies. The third component is being realized through collaboration with the NNIN University 3 CNF facility as a hands- on workshop for the students.

Introduction Understanding particle transport, deposition and removal is of crucial importance to many technologies that are critical for the competitiveness of the US microelectronic, imaging and pharmaceutical industries.

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Ahmadi, G. (2010, June), Course Development Experience On Particle Transport, Deposition And Removal And Engineering Of Nano/Micro Scale Systems Paper presented at 2010 Annual Conference & Exposition, Louisville, Kentucky. 10.18260/1-2--15635