June 26, 2011
June 26, 2011
June 29, 2011
22.683.1 - 22.683.11
Experimental Modules Introducing Microfabrication Utilizing A Multidisciplinary Approach Microfabrication, the processes for fabricating miniature structures of micrometer sizesand smaller, is a critical area to many branches of science and engineering. It is heavily used tomake both electronic devices like integrated circuits and semiconductor chips, as well as deviceslike accelerometers, lasers, and miniature microphones. Since microfabrication is such a broadand multidisciplinary activity, the conventional approach of presenting this topic in a singlecourse in one department seems inappropriate. In this poster, we describe our efforts tointroduce microfabrication technology in a comprehensive, cross-curricular way throughlectures, demonstrations and experiments from freshman through junior classes across fourdisciplines (Electrical and Mechanical Engineering, Chemistry, and Physics). In particular, wedescribe the multidisciplinary fabrication experiments that we have designed. Junior level courses from four departments will integrate microfabrication experimentalmodules into the existing syllabi. This module will expose the students to what a clean room is,what microfabrication is, and attract and interest them in the microfabrication side of theirdiscipline. In the senior year, students in these disciplines have an opportunity to take amultidisciplinary microfabrication capstone course that serves as a complete introduction toclean room theory and practice. The example modules presented in this poster include fabricating a thin film transistor,fabricating an organic light emitting device(OLED) and fabricating a microfluidic device. Thetransistor module will expose students to the important design parameters of a transistor and howthey are characterized. The OLED module will introduce the technology and language ofdisplays as well as measurements of the device efficiency in converting power to visible color.Finally, the microfluidic module will demonstrate routing of fluidics on the micrometer channelscale – this is a common application in biomedical fields. Every student will be exposed to all ofthese fields, leading to a broad, deep, and detailed educational experience. An example of thetransistor fabrication project is illustrated in Figure 1. The student’s satisfaction and change in knowledge will be measured by pre- and post-course assessments. Results of the surveys are presented in this poster and will be used refinethe course in subsequent years.Figure 1. Thin film transistors fabricated by student.
Wagoner, S., & Klotzkin, D., & Jr., E. W. (2011, June), Experimental Modules Introducing Microfabrication Utilizing a Multidisciplinary Approach Paper presented at 2011 ASEE Annual Conference & Exposition, Vancouver, BC. 10.18260/1-2--17964
ASEE holds the copyright on this document. It may be read by the public free of charge. Authors may archive their work on personal websites or in institutional repositories with the following citation: © 2011 American Society for Engineering Education. Other scholars may excerpt or quote from these materials with the same citation. When excerpting or quoting from Conference Proceedings, authors should, in addition to noting the ASEE copyright, list all the original authors and their institutions and name the host city of the conference. - Last updated April 1, 2015