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Experimental Modules Introducing Microfabrication Utilizing a Multidisciplinary Approach

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2011 ASEE Annual Conference & Exposition


Vancouver, BC

Publication Date

June 26, 2011

Start Date

June 26, 2011

End Date

June 29, 2011



Conference Session

NSF Grantees Poster Session

Tagged Topic

NSF Grantees

Page Count


Page Numbers

22.683.1 - 22.683.11



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Paper Authors


Shawn Wagoner Binghamton University

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Director, Nanofabrication Labatory at Binghamton University, Research Assistant Professor, Department of Physics, Binghamton University,

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David Klotzkin Binghamton University

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David Klotzkin received the B.S. degree in electrical engineering from Rennselaer Polytechnic Institute, Troy, NY, in 1988, the M.S. degree in materials science from Cornell University, Ithaca, NY, in 1994, and the M.S. and Ph.D. degrees in electrical engineering from the University of Michigan, in 1997 and 1998, respectively. His research interests are in optoelectronics devices, including semiconductor lasers, waveguide amplifiers, organic light emitters, and photonic-crystal based planar lightwave circuits. His industrial experience includes three years of graphics hardware design at IBM corporation from 1988-1991, and several years of semiconductor laser design for telecommunications applications at various companies, including Lucent Technologies and Agere Systems. In 2002, he joined the Electrical, Computer Engineering and Computer Science Department at the University of Cincinnati. In 2008, he moved to the Electrical and Computer Engineering Department of Binghamton University.

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E. White, Jr. Binghamton University

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Dept. of Physics and Materials Science Program

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Experimental Modules Introducing Microfabrication Utilizing A Multidisciplinary Approach Microfabrication, the processes for fabricating miniature structures of micrometer sizesand smaller, is a critical area to many branches of science and engineering. It is heavily used tomake both electronic devices like integrated circuits and semiconductor chips, as well as deviceslike accelerometers, lasers, and miniature microphones. Since microfabrication is such a broadand multidisciplinary activity, the conventional approach of presenting this topic in a singlecourse in one department seems inappropriate. In this poster, we describe our efforts tointroduce microfabrication technology in a comprehensive, cross-curricular way throughlectures, demonstrations and experiments from freshman through junior classes across fourdisciplines (Electrical and Mechanical Engineering, Chemistry, and Physics). In particular, wedescribe the multidisciplinary fabrication experiments that we have designed. Junior level courses from four departments will integrate microfabrication experimentalmodules into the existing syllabi. This module will expose the students to what a clean room is,what microfabrication is, and attract and interest them in the microfabrication side of theirdiscipline. In the senior year, students in these disciplines have an opportunity to take amultidisciplinary microfabrication capstone course that serves as a complete introduction toclean room theory and practice. The example modules presented in this poster include fabricating a thin film transistor,fabricating an organic light emitting device(OLED) and fabricating a microfluidic device. Thetransistor module will expose students to the important design parameters of a transistor and howthey are characterized. The OLED module will introduce the technology and language ofdisplays as well as measurements of the device efficiency in converting power to visible color.Finally, the microfluidic module will demonstrate routing of fluidics on the micrometer channelscale – this is a common application in biomedical fields. Every student will be exposed to all ofthese fields, leading to a broad, deep, and detailed educational experience. An example of thetransistor fabrication project is illustrated in Figure 1. The student’s satisfaction and change in knowledge will be measured by pre- and post-course assessments. Results of the surveys are presented in this poster and will be used refinethe course in subsequent years.Figure 1. Thin film transistors fabricated by student.

Wagoner, S., & Klotzkin, D., & Jr., E. W. (2011, June), Experimental Modules Introducing Microfabrication Utilizing a Multidisciplinary Approach Paper presented at 2011 ASEE Annual Conference & Exposition, Vancouver, BC. 10.18260/1-2--17964

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