Asee peer logo

High Tech Equipment Simulation

Download Paper |


2003 Annual Conference


Nashville, Tennessee

Publication Date

June 22, 2003

Start Date

June 22, 2003

End Date

June 25, 2003



Conference Session

Curriculum Development in Computer ET

Page Count


Page Numbers

8.634.1 - 8.634.9



Permanent URL

Download Count


Request a correction

Paper Authors

author page

Sivakum Venkatanarayanan

author page

John Robertson Arizona State University

author page

Lakshmi Munukutla Arizona State University

Download Paper |

NOTE: The first page of text has been automatically extracted and included below in lieu of an abstract

Session #1447

High-tech equipment simulation

John Robertson, Sivakumar Venkatanarayanan College of Technology & Applied Sciences Arizona State University 7001 E Williams Field Rd, Mesa, AZ 85212


Tools used to fabricate integrated circuits have now reached a level of cost and complexity that are far beyond the capacity of an academic group to acquire or (even if donated) to support adequately. Simulation is an obvious but underused way to provide a broad and realistic environment to demonstrate how the tools work. This paper describes simulation of an ion implanter and simulations for other tools are being developed using the same principles. The control computer emulates all the typical features of a real machine (physical set-up, calibration and operation). In addition, typical faults in the tool can also be introduced. The tool simulator can also be linked to conventional process simulators for virtual lab activities at several course levels.

1. Tools for technology teaching

Any mature commercial technology is intrinsically a complete and well-balanced solution. Microelectronics is a good example where a wide range of skills and disciplines are practiced at a very high level of competency. Design, production and applications interact continuously; technology development is rapid and international competitiveness puts a high premium on a first-class workforce. Arizona has a large semiconductor industry with Intel, Motorola, STM, Microchip, TI, Medtronic, ON Semiconductor and ASML as the leaders. Total employment exceeds 25,000 and more than half have some level of technical qualification. To meet the educational demands for workforce development, an ad hoc partnership of companies and higher education institutions has developed around the Microelectronics Teaching Factory (MTF) at ASU’s East campus.

The physical core is the Microelectronics Teaching Factory is a 15,000 sq ft fully facilitized clean room equipped for 150mm wafer processing. Many tools have been

Proceedings of the 2003 American society for Engineering Eucation. Annual Conference & Exposition Copyright © 2003, American Society for Engineering Education

Venkatanarayanan, S., & Robertson, J., & Munukutla, L. (2003, June), High Tech Equipment Simulation Paper presented at 2003 Annual Conference, Nashville, Tennessee. 10.18260/1-2--12418

ASEE holds the copyright on this document. It may be read by the public free of charge. Authors may archive their work on personal websites or in institutional repositories with the following citation: © 2003 American Society for Engineering Education. Other scholars may excerpt or quote from these materials with the same citation. When excerpting or quoting from Conference Proceedings, authors should, in addition to noting the ASEE copyright, list all the original authors and their institutions and name the host city of the conference. - Last updated April 1, 2015