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Session #1447

High-tech equipment simulation

John Robertson, Sivakumar Venkatanarayanan College of Technology & Applied Sciences Arizona State University 7001 E Williams Field Rd, Mesa, AZ 85212

Abstract

Tools used to fabricate integrated circuits have now reached a level of cost and complexity that are far beyond the capacity of an academic group to acquire or (even if donated) to support adequately. Simulation is an obvious but underused way to provide a broad and realistic environment to demonstrate how the tools work. This paper describes simulation of an ion implanter and simulations for other tools are being developed using the same principles. The control computer emulates all the typical features of a real machine (physical set-up, calibration and operation). In addition, typical faults in the tool can also be introduced. The tool simulator can also be linked to conventional process simulators for virtual lab activities at several course levels.

1. Tools for technology teaching

Any mature commercial technology is intrinsically a complete and well-balanced solution. Microelectronics is a good example where a wide range of skills and disciplines are practiced at a very high level of competency. Design, production and applications interact continuously; technology development is rapid and international competitiveness puts a high premium on a first-class workforce. Arizona has a large semiconductor industry with Intel, Motorola, STM, Microchip, TI, Medtronic, ON Semiconductor and ASML as the leaders. Total employment exceeds 25,000 and more than half have some level of technical qualification. To meet the educational demands for workforce development, an ad hoc partnership of companies and higher education institutions has developed around the Microelectronics Teaching Factory (MTF) at ASU’s East campus.

The physical core is the Microelectronics Teaching Factory is a 15,000 sq ft fully facilitized clean room equipped for 150mm wafer processing. Many tools have been

Proceedings of the 2003 American society for Engineering Eucation. Annual Conference & Exposition Copyright © 2003, American Society for Engineering Education

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Venkatanarayanan, S., & Robertson, J., & Munukutla, L. (2003, June), High Tech Equipment Simulation Paper presented at 2003 Annual Conference, Nashville, Tennessee. 10.18260/1-2--12418