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Instructional Materials For A Technician Level Course In Plasma Aided Manufacturing

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2005 Annual Conference


Portland, Oregon

Publication Date

June 12, 2005

Start Date

June 12, 2005

End Date

June 15, 2005



Conference Session

Curriculum Development in Manufacturing ET

Page Count


Page Numbers

10.774.1 - 10.774.8



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Paper Authors

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David Hata

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NOTE: The first page of text has been automatically extracted and included below in lieu of an abstract

Instructional Materials for a Technician-Level Course in Plasma-Aided Manufacturing David M. Hata Portland Community College


Plasma-aided manufacturing is a critical technology in the manufacture of integrated circuits, MEMS, and other nano-scale components as well as the surface modification and coating of a variety of materials. As a result, there is a growing need for technicians to be equipped to install, maintain, and troubleshoot plasma-based tools. Community colleges have been ill-equipped to meet this need, lacking educational materials, teaching laboratories, and knowledgeable faculty.

Portland Community College, through a grant from the Advanced Technological Education Program at the National Science Foundation, has addressed this need by developing technician-level educational materials, prototyping a teaching laboratory for plasma-aided manufacturing, and training community college faculty.[1] This paper provides a summary of PCC’s three-year development and implementation effort.


The lack of instructional materials is a major deterrent in developing and implementing a technician-level course in RF plasma processing at the community college level. A search of the literature produced only graduate-level textbooks.[2,3]

Equipment needed to implement a teaching laboratory to support a technician-level course was also lacking. Equipment to support simple plasma demonstrations was available from scientific equipment companies, e.g. Fisher Scientific, but no plasma training systems were on the market. Low-end process tools that could be adapted to serve as a training system in a teaching environment were available, but the minimal cost of these production systems was in the range of $60,000 to $80,000.

Given these deficiencies and the fact that few community college instructors had the technical experience in plasma-aided manufacturing to produce needed instructional materials in RF plasma technology, virtually no courses in RF plasma technology were being offered in technician-level degree programs. To address these deficiencies, the National Science Foundation awarded Portland Community College a three-year grant through their Advanced Technological Education Program. This paper describes the products and results of this three-year project.

“Proceedings of the 2005 American Society for Engineering Education Annual Conference & Exposition Copyright 2005, American Society for Engineering Education”

Hata, D. (2005, June), Instructional Materials For A Technician Level Course In Plasma Aided Manufacturing Paper presented at 2005 Annual Conference, Portland, Oregon. 10.18260/1-2--15304

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