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Instructional Resources for a Technician-Level Plasma Technology Course

David M. Hata Portland Community College

Abstract

Text materials, training systems, and supporting laboratory exercises have been developed by Portland Community College to support a technician-level course in plasma technology. Faculty workshops are planned for 2003 and 2004 to equip community college faculty to teach technician-level courses in plasma technology. The project is funded through an Advanced Technological Education Program grant from the National Science Foundation.

Introduction

Plasma technology, although not as pervasive in the wafer fab as vacuum technology, is essential to the manufacture of integrated circuits. Plasma-based tools are used to clean the surface of wafers, deposit materials on wafer surfaces, etch surface layers, and implant dopant atoms into the wafer itself.

Despite the growing importance of plasma-aided manufacturing in semiconductor and surface coating industries, only a small number of community colleges have developed plasma technology courses or integrated plasma technology topics into other related technology courses. Even those technical programs with stand alone plasma technology courses are struggling to fully implement their courses. Major roadblocks to implementation of technician-level plasma technology courses at the community college level include the lack of suitable textbooks, lack of plasma training systems, and lack of faculty expertise in this emerging technology.

Portland Community College, through an Advanced Technological Education Program grant from the National Science Foundation, DUE 0101533, is addressing this need for instructional resources and faculty enhancement opportunities. The project aims to create technician-level instructional materials, prototype plasma training systems, and host workshops for community college faculty.

Context

Because of the interplay of multiple disciplines in the study of plasma-aided manufacturing, the design and placement of a plasma-aided manufacturing course in an associate degree program is critical.1 By necessity, a plasma technology or plasma-aided

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Hata, D. (2003, June), Instructional Resources For A Technician Level Plasma Technology Course Paper presented at 2003 Annual Conference, Nashville, Tennessee. 10.18260/1-2--11725