June 18, 2006
June 18, 2006
June 21, 2006
11.923.1 - 11.923.14
MEMS and Microsystem Courses with National and International Dissemination*
The Wireless Integrated MicroSystems (WIMS) Engineering Research Center (ERC) has developed a broad comprehensive MEMS and microsystem curriculum suitable for upper-level undergraduate students, graduate students, and industry professionals. Five core courses were in the initial curriculum design. The design had flexibility that invited development of other core courses, as well as related technical electives and breadth electives. The core courses provide instruction in MEMS, Microsystems, major design and laboratory measurements, and societal impact. The course enrollments have been strong. A master of engineering in integrated microsystems degree program was developed so that industry professionals would have a focused set of coursework, while providing flexibility that would permit custom tailoring of the total course package to serve specific needs. Distance education dissemination of the courses as whole courses, or as discrete portions of course materials, was intended to be available; that goal has been realized. The core courses originate at the University of Michigan (UM), and have been distributed to Michigan State University (MSU), Michigan Technological University (MTU), Howard University (HU), University of Puerto Rico – Mayaguez (UPRM), and Western Michigan University (WMU). Rochester Institute of Technology (RIT) has used materials from the UM core courses in its offerings. Other institutions that have used the course web-streaming video and course materials are University of Lille, Darmstadt University, and Middle East Technical University.
Introduction and Overview
The Engineering Research Center for Wireless Integrated MicroSystems (WIMS ERC) has developed five core courses (Figure 1) that provide a broad comprehensive curriculum in MEMS and microsystems for upper-level undergraduate students, graduate students, and industry professionals. The five core courses originate at the University of Michigan (UM): Introduction to MEMS (EECS 414), Integrated Microsystems Laboratory (EECS 425), Advanced MEMS Devices and Technologies (EECS 514), Advanced Integrated Microsystems (EECS 515), and Societal Impact of Microsystems (EECS 830). The first of these courses has now been disseminated worldwide, while the second is exploring ways of porting a laboratory course to different universities. The Societal Impact course explores the global societal challenges that will be faced by students during their careers and how microsystems will be used to address them. Each course is a four credit-hour course, except EECS 830 is a two credit-hour course.
During a two-day education retreat, the MEMS/Microsystem curriculum was designed to (1) provide students with a comprehensive background in MEMS/microsystems theory, fabrication, practice, applications, and technology, (2) accommodate students from broad disciplines across science and engineering by developing a first course that had minimal prerequisites in science (physics and chemistry), math, and engineering, (3) use the first course as the only prerequisite for the remaining core courses, (4) develop course materials with the expectation that distance education with web-based dissemination would be a primary format, (5) serve undergraduate and
McAfee, L., & Najafi, K., & Gianchandani, Y., & Wise, K. D., & Maharbiz, M. M., & Aslam, D., & Bergstrom, P., & Friedrich, C. (2006, June), Mems And Microsystems Courses With National And International Dissemination Paper presented at 2006 Annual Conference & Exposition, Chicago, Illinois. 10.18260/1-2--1318
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