June 26, 2011
June 26, 2011
June 29, 2011
Electrical and Computer
22.1721.1 - 22.1721.11
“MUMPs” Multi-User-MEMS-Processes as Teaching and Design Tools in MEMS InstructionAbstractThe paper describes use of “MUMPs” (Multi-User-MEMS-Processes) as a platform to teachSilicon based MEMS technologies and to implement design projects in a new interdisciplinarysenior level undergraduate engineering course offered at the University of Southern Maine. Inaddition to the standard lectures/reading/homeworks/tests routine of a typical courseworkstudents in this class are assigned to design, both as homeworks and as individual class termprojects, various sensors using integrated circuit layout design tools and standard Silicon MEMStechnologies available and known as “MUMPs” (Multi-User-MEMS-Processes). The Silicon-On-Insulator version of MUMPs which is named “SOI-MUMPs” was chosen for the finalprojects. Thanks to the funding received from NASA/MSGC successfully completed designs arecombined to form a multi-project MEMS chip and sent out to be fabricated. The multi-projectMEMS chips fabricated are packaged and wire bonded in house for testing. In the first yearoffering of the course “Impact” or “Crash” Sensors were designed and fabricated. In the secondoffering of the course “Capacitive Acceleration Sensors” were designed. On the side, seniorprojects assigned have created the platforms to test these sensors, namely, an accelerator whichcan create centrifugal g-forces up to 20g’s and a capacitive sensor computer interface withfemtoFarad resolution.Examples of designs, simulations, test equipment and setups used and the results obtained will bepresented to share this experience with the faculty and students attending the conference fromother institutions.
Guvench, M. G. (2011, June), “MUMPs” Multi-User-MEMS-Processes as Teaching and Design Tools in MEMS Instruction Paper presented at 2011 ASEE Annual Conference & Exposition, Vancouver, BC. 10.18260/1-2--17290
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