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“MUMPs” Multi-User-MEMS-Processes as Teaching and Design Tools in MEMS Instruction

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2011 ASEE Annual Conference & Exposition


Vancouver, BC

Publication Date

June 26, 2011

Start Date

June 26, 2011

End Date

June 29, 2011



Conference Session

ECE Division Poster Session

Tagged Division

Electrical and Computer

Page Count


Page Numbers

22.1721.1 - 22.1721.11



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Paper Authors


Mustafa G. Guvench University of Southern Maine

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Mustafa G. Guvench received M.S. and Ph.D. degrees in Electrical Engineering and Applied Physics from Case Western Reserve University. He is currently a full professor of Electrical Engineering at the University of Southern Maine. Prior to joining U.S.M. he served on the faculties of the University of Pittsburgh and M.E.T.U., Ankara, Turkey. His research interests and publications span the field of microelectronics including I.C. design, MEMS and semiconductor technology and its application in sensor development, finite element and analytical modeling of semiconductor devices and sensors, and electronic instrumentation and measurement. He can be reached at

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“MUMPs” Multi-User-MEMS-Processes as Teaching and Design Tools in MEMS InstructionAbstractThe paper describes use of “MUMPs” (Multi-User-MEMS-Processes) as a platform to teachSilicon based MEMS technologies and to implement design projects in a new interdisciplinarysenior level undergraduate engineering course offered at the University of Southern Maine. Inaddition to the standard lectures/reading/homeworks/tests routine of a typical courseworkstudents in this class are assigned to design, both as homeworks and as individual class termprojects, various sensors using integrated circuit layout design tools and standard Silicon MEMStechnologies available and known as “MUMPs” (Multi-User-MEMS-Processes). The Silicon-On-Insulator version of MUMPs which is named “SOI-MUMPs” was chosen for the finalprojects. Thanks to the funding received from NASA/MSGC successfully completed designs arecombined to form a multi-project MEMS chip and sent out to be fabricated. The multi-projectMEMS chips fabricated are packaged and wire bonded in house for testing. In the first yearoffering of the course “Impact” or “Crash” Sensors were designed and fabricated. In the secondoffering of the course “Capacitive Acceleration Sensors” were designed. On the side, seniorprojects assigned have created the platforms to test these sensors, namely, an accelerator whichcan create centrifugal g-forces up to 20g’s and a capacitive sensor computer interface withfemtoFarad resolution.Examples of designs, simulations, test equipment and setups used and the results obtained will bepresented to share this experience with the faculty and students attending the conference fromother institutions.

Guvench, M. G. (2011, June), “MUMPs” Multi-User-MEMS-Processes as Teaching and Design Tools in MEMS Instruction Paper presented at 2011 ASEE Annual Conference & Exposition, Vancouver, BC. 10.18260/1-2--17290

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