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Optimization of a Microfabrication Process of a thermomechanical micro actuator: The Bimorph Cantilever

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Conference

2020 Gulf Southwest Section Conference

Location

Online

Publication Date

July 20, 2020

Start Date

April 23, 2020

End Date

April 29, 2020

Page Count

3

DOI

10.18260/1-2-370.620-35996

Permanent URL

https://peer.asee.org/35996

Download Count

293

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Paper Authors

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Pallavi Sharma

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Sharma, P. (2020, July), Optimization of a Microfabrication Process of a thermomechanical micro actuator: The Bimorph Cantilever Paper presented at 2020 Gulf Southwest Section Conference, Online. 10.18260/1-2-370.620-35996

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