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Polymer Nano-Composite Micromachining by X-ray Lithography for MEMS Application

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Conference

2006 GSW

Location

unknown

Publication Date

March 17, 2006

Start Date

March 6, 2006

End Date

March 10, 2006

Page Count

11

DOI

10.18260/1-2-620-38861

Permanent URL

https://peer.asee.org/38861

Download Count

337

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Paper Authors

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Yoonyoung Jin

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Fareed Dawan

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Samuel Ibekwe

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Jost Goettert

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Guoqiang Li

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Eyassu Woldesenbet

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Jin, Y., & Dawan, F., & Ibekwe, S., & Goettert, J., & Li, G., & Woldesenbet, E. (2006, March), Polymer Nano-Composite Micromachining by X-ray Lithography for MEMS Application Paper presented at 2006 GSW, unknown. 10.18260/1-2-620-38861

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