Johnson, J. C., & Barakat, N., & Jiao, L. H. (2012, June), Procedure Development of Thermal Evaporation Process for Incorporation into Undergraduate Curriculum  Paper presented at 2012 ASEE Annual Conference & Exposition, San Antonio, Texas. 10.18260/1-2--21824

\bibitem{asee_peer_21824}
  Johnson, J. C., \& Barakat, N., \& Jiao, L. H. (2012, June), \emph{Procedure Development of Thermal Evaporation Process for Incorporation into Undergraduate Curriculum}
  Paper presented at 2012 ASEE Annual Conference \& Exposition, San Antonio, Texas.
  10.18260/1-2--21824

Jeffrey Corbet Johnson, Nael Barakat, and Lihong (Heidi) Jiao.  "Procedure Development of Thermal Evaporation Process for Incorporation into Undergraduate Curriculum".  2012 ASEE Annual Conference & Exposition, San Antonio, Texas, 2012, June.  ASEE Conferences, 2012.  https://peer.asee.org/21824 Internet.  27 Feb, 2025

\bibitem{asee_peer_21824}
  Jeffrey Corbet Johnson, Nael Barakat, and Lihong (Heidi) Jiao.
  "Procedure Development of Thermal Evaporation Process for Incorporation into Undergraduate Curriculum".
  \emph{2012 ASEE Annual Conference \& Exposition, San Antonio, Texas, 2012, June}.
  ASEE Conferences, 2012.
  https://peer.asee.org/21824 Internet.  27 Feb, 2025

@INPROCEEDINGS{asee_peer_21824
author = "Jeffrey Corbet Johnson, Nael Barakat, and Lihong (Heidi) Jiao"
title = "Procedure Development of Thermal Evaporation Process for Incorporation into Undergraduate Curriculum"
booktitle = "2012 ASEE Annual Conference \& Exposition"
year = "2012"
month = "June"
address = "San Antonio, Texas"
publisher = "ASEE Conferences"
note = {https://peer.asee.org/21824}
number = {10.18260/1-2--21824}
}

TY  - CPAPER
AB  -      Assessment and development of process procedures for thermal             evaporation within an undergraduate contextThe physical vapor deposition of metal thin films by means of evaporation at lowpressure was investigated as part of an undergraduate research effort to improve processefficiency and outcomes utilizing in-place equipment. The overarching intent of the studywas to develop procedures for use by students in laboratory courses focused on the designand production of solid state devices. Three specific objectives were targeted: consistencyin achieving required layer thicknesses; stable deposition rates; final process proceduresto remain within tungsten filament tolerances in order to maximize usable life. Severalprocess variations were explored and conclusions were drawn as to the selection offilament configurations and process parameters, ultimately settling on a semiautomaticpower sequence using filaments shaped in a coil configuration.A power sequence that began with an automatically controlled ramp-up in the currentdelivered to the tungsten filament led to a higher degree of control and reproducibility ofdeposition parameters while also extending the life of the filament by reducing thermalwear. Coil filaments were preferred due to their comparably high current and voltagetolerances, carrying capacity, and moderate cost. Consideration was also given to thesurface topography resulting from varying deposition rates. A complete processprocedure was developed based on the work carried out in this study. It was found thatsome variability in processing results was unavoidable given the nature of the equipmentbut a higher probability of successful outcomes was achieved through employment of thedeveloped procedures.
AU  - Jeffrey Corbet Johnson
AU  - Nael Barakat
AU  - Lihong (Heidi) Jiao
CY  - San Antonio, Texas
DA  - 2012/06/10
PB  - ASEE Conferences
TI  - Procedure Development of Thermal Evaporation Process for Incorporation into Undergraduate Curriculum
UR  - https://peer.asee.org/21824
DO  - 10.18260/1-2--21824
ER  -