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Three-Dimensional Microelectromechanical Systems (MEMS) Structures Assembled from Polysilicon Surface Micromachined Elements Containing Continuous Hinges and Microrivets

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Conference

2003 GSW

Location

unknown

Publication Date

November 23, 2021

Start Date

March 30, 2003

End Date

April 2, 2003

Page Count

9

DOI

10.18260/1-2-620-38510

Permanent URL

https://peer.asee.org/38510

Download Count

465

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Paper Authors

author page

Edward S. Kolesar

author page

Matthew D. Ruff

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Kolesar, E. S., & Ruff, M. D. (2021, November), Three-Dimensional Microelectromechanical Systems (MEMS) Structures Assembled from Polysilicon Surface Micromachined Elements Containing Continuous Hinges and Microrivets Paper presented at 2003 GSW, unknown. 10.18260/1-2-620-38510

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