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Session 1313

Integration of Microelectronics-Based Unit Operations into the ChE Curriculum

Milo D. Koretsky, Chih-hung (Alex) Chang, Sho Kimura, Skip Rochefort and Cyndie Shaner

Department of Chemical Engineering Oregon State University Corvallis, OR 97331-2702

Abstract Historically, chemical engineering has been focused on petrochemical and bulk chemical production. However, over the last 10-15 years, more chemical engineers and chemical engineering opportunities for new graduates have moved into the microelectronics industry. This is especially true in Oregon and at Oregon State University (OSU), where approximately 60% of the B.S. and M.S. graduates in the last five years have been employed in some sectors of the microelectronics and related industries. A number of schools have started to incorporate microelectronic processing into their curriculum. For the most part, this material tends to be presented in specialized, elective courses. However, when presented in the context of core chemical engineering courses, these unit operations can provide students with depth as well as breadth knowledge. The chemical engineering department at OSU is committed to developing strength in microelectronics processing within the context of the fundamental skills of the discipline. To this end, we are developing curricular and experimental modules from selected unit operations common in the microelectronics industry, and are integrating these into the classroom and the laboratory. Unit operations include: plasma etching, spin coating, chemical vapor deposition, electrodeposition and chemical mechanical planarization. The curricular modules are intended to reinforce core ChE fundamentals with examples from microelectronics processing. The lab modules provide students with hands-on learning in this area as well as more open-ended problem solving experiences. The incorporation of these microelectronics unit operations into core engineering science classes, into senior lab and into process design will be presented.

1. Introduction The semiconductor industry has grown rapidly in the last three decades. The chemical technologies have played a central role in this continuing evolution. Historically, chemical engineering has been focused on petrochemical and bulk chemical production. However, more and more chemical engineers are working in the microelectronics and related industries. For example, the most recent AIChE placement survey shows that from 1997 to 1998 the number of BS graduates placed in the electronics industry increased over 50% from 7.0% of BS graduates to 11.4%. The percentage of ChE graduates hired into this industry with advanced degrees is

Proceedings of the 2003 American Society for Engineering Education Annual Conference & Exposition Copyright © 2003, American Society for Engineering Education

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Chang, C., & Rochefort, S., & Kimura, S., & Koretsky, M. (2003, June), Integration Of Microelectronics Based Unit Operations Into The Che Curriculum Paper presented at 2003 Annual Conference, Nashville, Tennessee. 10.18260/1-2--11824