Plotkowski, A. J., & Jiao, L. H., & Barakat, N. (2012, June), Design and Computational Analysis of Diaphragm-based Piezoresistive Pressure Sensors for Integration into Undergraduate Curriculum    Paper presented at 2012 ASEE Annual Conference & Exposition, San Antonio, Texas. 10.18260/1-2--21144

\bibitem{asee_peer_21144}
  Plotkowski, A. J., \& Jiao, L. H., \& Barakat, N. (2012, June), \emph{Design and Computational Analysis of Diaphragm-based Piezoresistive Pressure Sensors for Integration into Undergraduate Curriculum  }
  Paper presented at 2012 ASEE Annual Conference \& Exposition, San Antonio, Texas.
  10.18260/1-2--21144

Alexander Joseph Plotkowski, Lihong (Heidi) Jiao, and Nael Barakat.  "Design and Computational Analysis of Diaphragm-based Piezoresistive Pressure Sensors for Integration into Undergraduate Curriculum  ".  2012 ASEE Annual Conference & Exposition, San Antonio, Texas, 2012, June.  ASEE Conferences, 2012.  https://peer.asee.org/21144 Internet.  24 Apr, 2024

\bibitem{asee_peer_21144}
  Alexander Joseph Plotkowski, Lihong (Heidi) Jiao, and Nael Barakat.
  "Design and Computational Analysis of Diaphragm-based Piezoresistive Pressure Sensors for Integration into Undergraduate Curriculum  ".
  \emph{2012 ASEE Annual Conference \& Exposition, San Antonio, Texas, 2012, June}.
  ASEE Conferences, 2012.
  https://peer.asee.org/21144 Internet.  24 Apr, 2024

@INPROCEEDINGS{asee_peer_21144
author = "Alexander Joseph Plotkowski, Lihong (Heidi) Jiao, and Nael Barakat"
title = "Design and Computational Analysis of Diaphragm-based Piezoresistive Pressure Sensors for Integration into Undergraduate Curriculum  "
booktitle = "2012 ASEE Annual Conference \& Exposition"
year = "2012"
month = "June"
address = "San Antonio, Texas"
publisher = "ASEE Conferences"
note = {https://peer.asee.org/21144}
number = {10.18260/1-2--21144}
}

TY  - CPAPER
AB  -             Design and computational analysis of diaphragm based piezoresistive              pressure sensors for integration into undergraduate curriculumIn order to expand undergraduate education in microelectromechanical systems (MEMS), aseries of sensors were designed with the intent of being integrated into the laboratory portion of acourse on the subject. The majority of the design work was focused around piezoresistive,diaphragm based pressure sensors, utilizing multiple diaphragm sizes and geometries. Thesesensors were chosen for the geometrical simplicity and their ability to be manufactured usingstandard photolithography techniques. While analytical solutions for the stress in suchdiaphragms under a uniform applied pressure exist, they are very complex. In order to gain adeeper understanding of the stress distribution in order to make design decisions, Finite ElementAnalysis (FEA) was used. The analytical models were used to validate the FEA model, and oncethis was accomplished, multiple iterations were performed in order to gain an understanding ofthe stress variation with diaphragm size, geometry, and thickness. The results of thesesimulations were used to optimize the placement of the piezoresistors and to assess the effect ofprocess variation in the size and thickness of the diaphragm on the overall performance of thedevice. This analysis procedure aided in the design of pressure sensors with two differentdiaphragm geometries in three different sizes each with characteristic lengths ranging from 200to 500 μm with a thickness of 10 μm. The FEA model and the design process developed in thiswork will be implemented in the Fall of 2011 with full undergraduate laboratory integrationplanned for the Fall of 2012.
AU  - Alexander Joseph Plotkowski
AU  - Lihong (Heidi) Jiao
AU  - Nael Barakat
CY  - San Antonio, Texas
DA  - 2012/06/10
PB  - ASEE Conferences
TI  - Design and Computational Analysis of Diaphragm-based Piezoresistive Pressure Sensors for Integration into Undergraduate Curriculum  
UR  - https://peer.asee.org/21144
DO  - 10.18260/1-2--21144
ER  -