Collection

2000 Annual Conference

Authors

Oguz A. Soysal

. Page 5.164.4The CIE workstation developed at FSU consists of a PC equipped with one GPIB and one DAQcard. DAQ can perform A/D and D/A conversion at a rate of 100 K samples/s. It has eight analoginputs, two analog outputs, and three eight bit digital I/O ports. Analog inputs can be configuredas single ended or differential mode to measure up to 10 V or ±5 V respectively. The LabVIEWversion 5.1 software is used for instrument control, data acquisition, and visualization.The workstation shown in Figure 3 can be used as a server for online labs, by using "LabVIEWInternet Toolkit" software. This software provides an http server utility and development toolsfor CGI, SMTP, and FTP applications. Figure 4 illustrates the general layout of an online

Collection

1997 Annual Conference

Authors

Saleh M. Sbenaty

the Graduate School, Dr.Donald Curry, and to the Faculty Research Committee/Summer Research Program for thefinancial support and encouragement. The author is also grateful to Dr. Homer M. Powell for hishelp and technical support.REFERENCES1. T. Ishii and S. Namba, “Gas Evelotion from Transformer Insulating Materials Due to Aging Deterioration,” Electrical Engineering in Japan, Vol. 90, No. 3, 1970, pp. 53-61.2. H. Kinoshita et al., “Judgment of Electrical Insulation Deterioration by Gas Analysis Test on Oil Insulating Power Transformer,” Transactions IEE Journal, Vol. 94-B, 1974, pp. 65-72.3. E. Dornenburg and O. E. Gerber, “Analysis of Dissolved and Free Gases for Monitoring Performance of Oil- Filled Transformers

Collection

1997 Annual Conference

Authors

Bruce A. Finlayson

. Page 2.428.11 22. LLDPE is flowing in a die that has a height of 1 mm, a width of 30 mm, and is 60 mm long. The viscosity of the fluid is governed by the Carreau equation: η0 η= b c [1 + (λγ˙ ) ] η0 = 8818 Pa s λ = 0.1813 sec b = 0.975 c = 0.428 Use the shooting method to find the the flow rate that will occur if the pressure difference is 820 psi over a length of 60 mm under the following conditions. (a) Assume a Newtonian fluid with a viscosity of 8818 Pa s. (b) Use the Carreau model.Partial Differential Equations. In this course, none of the important models required thesolution of partial

Collection

1997 Annual Conference

Authors

Susan M. Lord

Page 2.448.5support and encouragement of Maurice Aburdene and Victor Chang are also sincerelyappreciated.REFERENCES1. For example, see: Aburdene, M. F., R. G. McGinnis and D. J. Cartwright, “Exploring Engineering,” Frontiers in Education Conference, 1990, Vienna, Austria. and Schuster, D. S., T. B. Cunningham, and S. A. Richardson, “Exploring Engineering -- The Five Year Evolution of an Interdisciplinary Engineering Course,” World Conference on Engineering Education, 1995, Minneapolis, Minnesota.2. Professor Emily Allen at San Jose State University used this laboratory in MatE 153 “Electronic, Optical, and Magnetic Properties of Materials” in November 1996. Prof. Allen says “It also demonstrates how important the Web is

Collection

1997 Annual Conference

Authors

Barbara Olds; Ronald Miller

trained writing instructors, we recently implemented the use of holistic grading in theseminar. The purpose of this experiment was to find out if we could provide students with usefulfeedback on their writing (especially their weekly critiques of the assigned seminar readings)without the need for extensive editing of each written assignment. The reading critiques weregenerally 2-3 pages long; in each paper, students were asked to briefly summarize the readingsassigned for each seminar and then critically analyze one or two of the major argumentsdeveloped by the author(s).The first step in this process was developing the scoring rubric shown in Table I [adapted fromref. 6]. We specifically chose a scoring scale different from 1-10 or 1-100 to

Collection

1997 Annual Conference

Authors

Elizabeth A. Eschenbach

. Page 2.479.1There are others using peer evaluation for enhancing team work. For instance, the peerevaluation format that is described in this paper is a combination of methods used in a graduatedesign course of Professor Gregory Deierlein of Cornell University [5] and a first year designcourse taught at the University Colorado at Boulder [6].ENGR 111 Introduction to DesignHumboldt State University has one of the oldest and largest accredited programs inenvironmental engineering in the country. The Environmental Resources EngineeringDepartment was accredited in the 1970’s and currently has about 350 majors. Students work inteams throughout the curriculum of the ERE major. All majors are required to take ENGR 111Introduction to Design, which has

Collection

1998 Annual Conference

Authors

Donald J. Winiecki

paper are remarkably“unremarkable,” their mundane appearance belies their importance in educational interactions. Page 3.119.7Bibliographic InformationBates, A. W. (1995). Technology, open learning and distance education. London: Routledge.Garfinkel, H. (1967). Studies in ethnomethodology. New York: Prentice-Hall.Heath, C., & Luff, P. (1992). Media space and communicative asymmetries: Preliminary observations of video-mediated interaction. Human Computer Interaction, 7 (3). 315-346.Hymes, D. (1974). Foundations in sociolinguistics: An ethnographic approach. Philadelphia, PA: University ofPennsylvania Press.Mankin, D., Cohen, S. G., &

Collection

1998 Annual Conference

Authors

Jr., Harry J. Sauer

Session 2533 Building Energy Analysis Software Harry J. Sauer, Jr., Yogita Gidh University of Missouri-RollaEffective utilization and conservation of the significant energy used by building systems has been of great importin the decades following the energy crisis of the 1970's. The energy consumption of the heating, ventilating, andconditioning (HVAC) system represents a major part of the building's requirements. Software for accuratelyevaluating the performance of various types of HVAC systems and of the available energy saving options provesuseful both for the design

Conference Session

Materials Lab Experiments and Demonstrations

Collection

2010 Annual Conference & Exposition

Authors

Lori Rosario, Rochester Institute of Technology; Elizabeth Dell, Rochester Institute of Technology

Tagged Divisions

Materials

. University of Mauritius. Reduit Mauritius. Elsevier Ltd. 2006.2. Casey, L. Growth forecasted for biodegradable polymer market. Packaging Digest. February, 2010.3. Bastioli, C. Handbook of Biodegradable Polymers. Chapter 1. Rapra Technology Limited. Shawbury, Shrewsbury, Shropshire, SY4 4NR, UK. 2005.4. Taggart, S. Two words: Biodegradable plastic. 25 April 2002. Wired.com. Accessed December, 2009. 5. Platt, D.K. Biodegradable Polymers. Rapra Market Report. 2006.6. Nolan-ITU Pty Ltd. Biodegradable plastics - Developments and environmental impacts. Report prepared for Australia Department of Environment and Water Resources. October 2002. Accessed December, 2009. .7. Narayan, R. and Pettigrew, C. ASTM standards define

Conference Session

Learning by Doing

Collection

2010 Annual Conference & Exposition

Authors

James Morgan, Texas A&M University; Luciana Barroso, Texas A&M University

Tagged Divisions

Civil Engineering

analysis and design courses.Bibliography1. Smith, K., J. Morgan, S. Ledlow, P.K. Imbrie, and J. Froyd, “Engaging Faculty in Active/CooperativeLearning,” Frontiers in Education, FIE 2003, Boulder, Colorado, November 8, 2003.2. Kenimer, A. and J. Morgan, “Active Learning Exercises Requiring Higher-Order Thinking Skills,” ASEE,Nashville, TN, June, 2003.3. Morgan, J. R., "Technology in the Classroom," 9th Annual TBEEC Conference on Enhancement of CurricularContent and Structure with Technology, Nashville, TN, November 20-21, 1997.4. Everett, L., P.K. Imbrie and J.R. Morgan, "Integrated Curricula: Purpose and Design," Journal of EngineeringEducation, v. 89, no. 2, April, 2000.5. Al-Holou, N, N. M. Bilgutay, C. Corleto, J. T. Demel, R. Felder, K. Frair

Conference Session

Robotics Curriculum

Collection

2010 Annual Conference & Exposition

Authors

William Michalson, Worcester Polytechnic Institute; Fred Looft, Worcester Polytechnic Institute

Tagged Divisions

Multidisciplinary Engineering

. 5 General Description You will develop a robotic system that carries a student s backpack that is expected to contain a laptop computer and several textbooks and notebooks. The robot will follow the student as s/he walks on the campus. When the student reaches a classroom building s/he will either lock the robot in a university-provided locker or carry the robot to class. The robot must be able to navigate on flat and inclined paved surfaces at a reasonable walking speed (up to 4 mph). The robot must be able to have enough on-board power to operate for at least two hours without recharging. Students should be able to recharge the robot by plugging the robot into a wall power outlet. Each team must develop a

Conference Session

Industry based new Innovative and Nontraditional Curriculum in Industrial Technology and Industrial Engineering Technology

Collection

2010 Annual Conference & Exposition

Authors

Julie Little-Wiles, Purdue University, West Lafayette; Stephen Hundley, Indiana University-Purdue University, Indianapolis; Erich Bauer, Indiana University-Purdue University, Indianapolis

Tagged Divisions

Engineering Technology

in regards to utilization of LMS products and studentengagement.As Kuh et al. (2001)6 discovered “...it appears that the further away from campus (walkingdistance, driving distance) the less likely a student is to take advantage of the educationalresources the institution provides” (p.5). It is up to administrators, IT professionals andinstructors to engage those urban, commuter students and provide them with the sameopportunities their fellow on campus colleagues can access.Bibliography1. Carliner, S. (2004.) An overview of online learning (2nd Ed.) Amherst, MA: HRD Press.2. Harasim, L. (1989). On-Line Education: A New Domain. In Mason, R., and Kaye. A (Eds.), Mindweave: Communication, Computers and Distance Education. (pp.50-62

Conference Session

Design with External Clients

Collection

2010 Annual Conference & Exposition

Authors

Ismail Orabi, University of New Haven

Tagged Divisions

Design in Engineering Education

engineers andmanagers. The experience has been a Win-Win scenario for the students and the Industrypartner. The students have the opportunity to work on a practical design project and to interactwith outside engineers. The companies also have the ability to work directly with some of ourbrightest and most capable students, providing them an opportunity to identify potential newhires.Bibliography1. Dym, C. L., A. M. Agogino, O. Eris, D. D. Frey, and L. J. Leifer. (2005). “Engineering Design Thinking,Teaching, and Learning.” Journal of Engineering Education, 94(1): 103- 120.2. Dutson, A. J., R. H. Todd, S. P. Magleby and C. D. Sorenson. (1997) “A Review of Literature on TeachingDesign through Project-Oriented Capstone Courses,” Journal of Engineering

Conference Session

Curricular Issues in Computer-Oriented Programs

Collection

2010 Annual Conference & Exposition

Authors

Thomas Hacker, Purdue University, West Lafayette

Tagged Divisions

Information Systems

://www.compete.org/.6. Council on Competitiveness, Spin Fiber Faster to Gain a Competitive Edge for U.S. Textile Manufacturing. 2005; Available from: http://www.compete.org/.7. Council on Competitiveness, Customized Catalysts to Improve Crude Oil Yields: Getting More Bang from Each Barrel. 2005; Available from: http://www.compete.org/.8. Council on Competitiveness, Full Vehicle Design Optimization for Global Market Dominance. 2005; Available from: http://www.compete.org/pdf/.9. Baker, M. and R. Buyya, Cluster computing: the commodity supercomputer. Software-Practice and Experience, 1999. 29(6): p. 551-76.10. Graham, S., M. Snir, and C. Patterson, Getting up to speed: The future of supercomputing. 2005: Natl Academy Pr

Conference Session

Pedagogy and Assessment in ECE II

Collection

2010 Annual Conference & Exposition

Authors

Rosalind Wynne, Villanova University

Tagged Divisions

Electrical and Computer

separation]. Ref: HW#4 Page 15.1219.10 problem 4.7” b. “[I] did not realize that gop [optical generation rate] and tau [recombination lifetime] were in different units. Reference: HW#4 problem: 4.7” c. “I used the value of 10-7 [u]s for tau instead of 10-1 us . Reference: Textbook: pg 143: Example 4-5 and pg. 131: Formula defined.” d. “I forgot how conductivity changed [when excess electrons and holes are created in a semiconductor]. Ref: Text: Pg. 124 and 102.” e. “I ran out of time and didn’t know how to do it [determine the quasi Fermi level]. Ref: Textbook pg 142-143” f. “For some reason I didn’t use no*po=ni2 [the

Conference Session

Issues and Solutions in Mathematics Education

Collection

2010 Annual Conference & Exposition

Authors

Dianne Raubenheimer, North Carolina State University; Hatice Ozturk, North Carolina State University; Alina Duca, NCSU

Tagged Divisions

Mathematics

curriculum. Paper presented at the ASEE Conference, Chicago, IL, June 18-21, 2006.4. Boardbridge, P. & Henderson, S. (2008). Mathematics education for 21st century engineering students: Final report. Melbourne, Australia: Australian Mathematical Sciences Institute.5. Green, .R., Harrison, A. S., Podcock, D. & Ward, J.P. (2004) The role of CAA in helping engineering undergraduates learn mathematics. Maths CAA Series: Nov 2004. Downloaded from http://ltsn.mathstore.ac.uk/articles/maths-caa-series/nov2004/index.shtml#abstract6. Cetty, M. (2000). A scheme for online Web-based assessment. Engineering science and education journal, 9(1), 27-32.7. Nahi, H.B., Charturvedi, S., Akan, A.O. & Pickering, J.W. (2007

Conference Session

Distance and Web-Based Learning in ET: Part I

Collection

2010 Annual Conference & Exposition

Authors

Sohail Anwar, Pennsylvania State University-Altoona College; Jane LeClair, Excelsior College; Arnie Peskin, Excelsior College

Tagged Divisions

Engineering Technology

fields of endeavor. Taken together, theseadvantages are propelling the college to make nanotechnology and power well-establishedofferings for engineering technologists.Bibliography1. Anwas, S. and H. Dhillon. “Development of an On-line Introduction to Nanotechnology Course: Issues and Challenges”. Proceedings of the 2008 ASEE Annual Conference.2. Meyyappan, M. “Nanotechnology Education and Training”. Journal of Materials Education Vol. 26 (3-4), 2004.3. Anwar, S., J. A. Rolle, and A. A. Memon. “Development and Delivery of On-line Upper Division Engineering Technology Courses”. Proceedings of the 2005 ASEE Annual Conference.4. Sridhara, B. “WebCT – A Powerful Web-Enhanced Instruction Tool for Engineering Technology Courses”. Proceedings of

Conference Session

Design Education I

Collection

2010 Annual Conference & Exposition

Authors

Priya Manohar, Robert Morris University

Tagged Divisions

Manufacturing

scheduling of the laboratory facilities andallowing students to customize their products.References 1. D. C. Davis, K. L. Gentili, M. S. Trevisa, and D. E. Calkins: Engineering design assessment, processes and scoring scales for program improvement and accountability, Journal of Engineering Education, Vol. 91 (No. 2), pp. 211-221, 2002. 2. E. Koehn: Preparing students for engineering design and practice, Journal of Engineering Education, Vol. 88 (No. 2), pp. 163-167, 1999. 3. S. Howe and J. Wilbarger: 2005 National survey of engineering capstone design courses, ASEE Annual Conference Proceedings, 2006. 4. Sheppard S. D. (1999): Design as Cornerstone and Capstone, Mechanical Engineering Design

Conference Session

Research in Graphics Education

Collection

2010 Annual Conference & Exposition

Authors

Eric Wiebe; Theodore Branoff; Mark Shreve

Tagged Divisions

Engineering Design Graphics

reported 19 different strategies for completing the materialrelated to the textbook. The top 3 strategies were: 1) watched the voiced-over PowerPoint, readand reviewed the chapter(s), and then completed the online assessment (30%); 2) read andreviewed the chapter(s) and then completed the online assessment (11%); and 3) read thechapter(s), watched the voiced-over PowerPoints, and then completed the online assessment(7%). Approximately 13% of students did not use a study strategy that involved viewing thevoiced-over PowerPoints5.This study was repeated during the fall 2008 semester with 3 sections of GC120 (74 students).The same streaming media presentations of the textbook material were available to studentsonline. The post course survey revealed

Conference Session

Engineering Professional Development for K-12 Teachers

Collection

2010 Annual Conference & Exposition

Authors

Silvia Carreño, Universidad de las Americas Puebla; Enrique Palou, Universidad de las Americas, Puebla; Aurelio López-Malo, Universidad de las Americas, Puebla

Tagged Divisions

K-12 & Pre-College Engineering

Studies, 1: 3-18.5. Ganesh, T., Thieken, J., Elser, M., Baker, D., Krause, S., Roberts, C., Kurpius-Robinson, S., Middleton, J. and Golden, J. 2009. Eliciting underserved middle-school youths’ notions of engineers: draw an engineer, Proceedings of the 2009 ASEE Annual Conference and Exposition, Austin, Texas, June 14 - 17.6. Karatas, F., Micklos. M. and Bodner, G. 2008. Sixth grade students’ images of engineering: what do engineers do? Proceedings of the 2008 ASEE Annual Conference and Exposition, Pittsburgh, Pennsylvania, June 22 - 25.7. Knight, M. and Cunningham, C.M. 2004. Draw an engineer test (DAET): Development of a tool to investigate students’ ideas about engineers and engineering. Proceedings of the 2004 ASEE

Conference Session

Computer Education Innovations I

Collection

2010 Annual Conference & Exposition

Authors

Cynthia Fry, Baylor University; Donald Gaitros, Baylor University

Tagged Divisions

Computers in Education

University was designed for intellectuallygifted, highly motivated students entering the School of Engineering & Computer Science (ECS)with a wide range of interests, who desire a more diverse experience across the disciplines. Theprogram seeks to broaden Computer Science Fellows’ backgrounds in their chosen area(s) ofdiversification while preparing them for a graduate studies or for successful careers. TheComputer Science Fellows is a major within the School of Engineering & Computer Sciencewhere fellows are free to create an individualized course of study with the advice of a programdirector who mentors them throughout the entire undergraduate experience. The program hascourse requirements in computer science as well as other core courses

Conference Session

Industry Sponsored Research and Project Initiatives in Industrial Technology & Industrial Engineering Technology

Collection

2010 Annual Conference & Exposition

Authors

Jorge Rodriguez, Western Michigan University; Alamgir Choudhury, Western Michigan University; Luis Rodriguez, University of Wisconsin - Waukesha

Tagged Divisions

Engineering Technology

Page 15.186.2process.At Western Michigan University (WMU) there is the requirement that all CEAS’s undergraduategraduating students must complete a Senior Design Project in a two-semester sequence. Projectsare presented by faculty members in the College, and students indicate their preferences.Subsequently, teams are formed, with the number of students in each team being decided by thetechnical advisor(s), the course coordinator, and any sponsor(s) in function of the expectationsfor the project. Most of the teams have three students, and students’ preferences have shifted inthe past years from having more interest on internal projects (i.e., no industry involvement) tohaving projects where an industry sponsor is involved. Among the many

Conference Session

Research on the First Year I

Collection

2010 Annual Conference & Exposition

Authors

Senay Purzer, Purdue University; Jing Chen, Purdue University

Tagged Divisions

First-Year Programs

. Categories Represented in the ASEE Proceedings Page 15.1170.6Page 15.1170.75. Gitlin, Andrew. (2001) Bounding teacher decision making: The threat of intensification. Educational Policy. Vol. 15 Issue 2, p227.6. Kalenscher, Tobias (2009). Decision-making and Neuroeconomics. Encyclopedia of Life Sciences (ELS). John Wiley & Sons, Ltd: Chichester.7. Li, Simon Y. W, Rakow, Tim, Newell, Ben R. (2009). Personal experience in doctor and patient decision making: from psychology to medicine. Journal of Evaluation in Clinical Practice. Vol. 15 Issue 6, p993-995.8. Pugh, S

Conference Session

Mechanics Division Poster Session

Collection

2010 Annual Conference & Exposition

Authors

Thomas Rockaway, University of Louisville; D. Joseph Hagerty, University of Louisville

Tagged Divisions

Mechanics

improvement in undergraduate instruction. SACS is the recognized regionalaccrediting body in Alabama, Florida, Georgia, Kentucky, Louisiana, Mississippi, NorthCarolina, South Carolina, Tennessee, Texas and Virginia for those institutions of highereducation that award associate, baccalaureate, master's or doctoral degrees. “An effective QEPshould be carefully designed and present a focused course of action that addresses a well-definedtopic or issue(s) related to enhancing student learning.”[1]In January 2005, a QEP Team of faculty, staff and students were charged with developing such aplan for the University of Louisville. A university-wide survey was conducted to identify areasof instruction that needed improvement, and solicit suggestions on ways

Conference Session

Electrical & Computer Engineering Division Poster Session

Collection

2010 Annual Conference & Exposition

Authors

Adrian Ieta, State University of New York, Oswego; Rachid Manseur, SUNY-Oswego; Thomas Doyle, McMaster University

Tagged Divisions

Electrical and Computer

ts s e le ne en ri e uip ab nd ct w ts pe ng a n la ex Cha me le nt d b a Implement changes ELECTRONICS LABORATORIES NO

Conference Session

Alternate Energy

Collection

2010 Annual Conference & Exposition

Authors

Luces Faulkenberry, University of Houston; Wajiha Shireen, University of Houston

Tagged Divisions

Engineering Technology

finals, coupled with various business and Christmasactivities of employees of CenterPoint Energy, and business travel by the PHEV representativemade it impossible to gather a group of CenterPoint Energy employees for the studentpresentations. Thus, only the CenterPoint Energy PHEV representative and the project professorwere gathered to hear the student presentations. A rating form was prepared for the CenterPointEnergy representative and the professor to rate the presentations. It is illustrated in Figure 1below. The students did not rate one another’s presentations because of the difficulty ofproviding anonymity. PHEV PROJECT CLASS PRESENTATION RATING SHEETPRESENTER(S) _______________names pre-typed by professor____PRESENTATION

Conference Session

Computers in Education Poster Session

Collection

2010 Annual Conference & Exposition

Authors

Hui-Ying Wu, Ching Yun University; HsinPiao Hsu, Kainan University

Tagged Divisions

Computers in Education

, S. (2001). Challenge and promise: Technology in the classroom. Retrieved March 18, 2002, from http://srdc.msstate.edu/publications/technologyed.pdf.4. Evans, C. (2008). The effectiveness of m-learning in the form of podcast revision lectures in higher education. Computers & Education, 50(2), 491-498.5. Flanagan, B. & Calandra, B. (2005). Podcasting for the K12 classroom. Learning and Leading with Technology, 33(3), 20-25.6. Gable, R., & Wolf, M. (Eds.). (1993). Instrument development in the affective domain. Boston: Kluwer Academic.7. Harris, H. Park, S. (2008). Educational usages of podcasting. British Journal of Educational Technology 39(3) 548-551.8. Hsu, H. (2003). Integrating technology

Conference Session

IE and the Classroom

Collection

2010 Annual Conference & Exposition

Authors

Lesley Strawderman, Mississippi State University; Laura Ruff, Mississippi State University

Tagged Divisions

Industrial Engineering

for careers as industrial engineers.The project work presented in this paper is ongoing. Future work includes expanded analysesthat will focus on assessing the impact of various factors on individual efficacy and satisfactionquestions, rather than average scores. The data will also be used to develop a predictive modelof career efficacy. Finally, the project will be expanded beyond industrial engineering, todetermine if similar conclusions can be drawn in other disciplines.Bibliography1. Hoitm, M. and M. Ohland, The impact of a discipline-based introduction to engineering course on improving retention, J. Eng. Edu., pp. 79-85, Jan. 1998.2. Courter, S., S. Millar and L. Lyons. From the students’ point of view: experiences in a freshman

Conference Session

Spatial Ability and Visualization in Graphics Education

Collection

2010 Annual Conference & Exposition

Authors

Patrick Connolly, Purdue University; James Beeler, Purdue University; Pat Connaughton, Purdue University; Jared Price, Purdue University; Ben Trefz, Purdue University

Tagged Divisions

Engineering Design Graphics

educational and social significance. San Diego, CA: Robert R. Knapp.7. Sorby, S. A. (2000). Spatial abilities and their relationship to effective learning of 3-D solid modeling software. Engineering Design Graphics Journal, 64(3), 30-35.8. Contero, M., Company, P., Saorin, J. L., & Naya, F. (2006). Learning support tools for developing spatial abilities in engineering design. International Journal of Engineering Education, 22(3), 470-477.9. Billinghurst, M. (2002). Augmented Reality in Education. Retrieved September 18, 2009, from http://www.newhorizons.org/strategies/technology/billinghurst.htm10. Kaufmann, H. (2003). Collaborative augmented reality in education. Paper for keynote speech at Imagina 2003 conference

Conference Session

ECE Division Poster Session

Collection

2011 ASEE Annual Conference & Exposition

Authors

Mustafa G. Guvench, University of Southern Maine

Tagged Divisions

Electrical and Computer

in oxide while a trench is back-etched in three steps torelease the device(s) above: (1) RIE removes the bottom oxide at the trench; (2) removal of thesubstrate using DRIE, stopping at the insulating oxide, and (3) a wet etch is used to remove theinsulating oxide from the bottom side of the field silicon. Once the trench is fully formed, theprotective oxide is etched from the top surface. Next, a photoresist mask is placed on the devicelayer so a final blanket metal consisting of 50nm of chromium and 600nm of gold can bedeposited for such things as residual stress, added mass, a second matrix of connectivity or anyother function a designer can imagine. Figure 1 gives cross section of the resulting structure. Thepiece seen hanging in air is